Lateral Calibration Standards

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Height Calibration Standards Other Calibration Artifacts Lateral Calibration Standards HOPG ESD Kit Electronic Devices

Lateral Calibration Standards

TGXYZ02

MikroMasch

XYZ Calibration Grating, 100nm Step Height, 5µm and 10µm Pitch

TGX

MikroMasch

Grating with Undercut Edge Structures for Lateral Calibration and AFM Tip Aspect Ratio Determination

CS-20NG

BudgetSensors

XYZ Calibration Nanogrid; Arrays with Down to 500nm Pitch; 20nm Height

TGXYZ01

MikroMasch

XYZ Calibration Grating, 20nm Step Height, 5µm and 10µm Pitch

TGXYZ03

MikroMasch

XYZ Calibration Grating, 500nm Step Height, 5µm and 10µm Pitch

TGF11

MikroMasch

Grating with Trapezoid Structures for Lateral Force Calibration and Scanner Nonlinearity Assessment

145TC

Advanced Surface Microscopy, Inc.

Traceable Calibration Specimen, 1-dimensional, 144nm Nominal Period, Al on Glass

150-1D

Advanced Surface Microscopy, Inc.

Calibration Specimen, 1-dimensional, 144nm Nominal Period, Al on Glass

150-2D

Advanced Surface Microscopy, Inc.

Calibration Specimen, 2-dimensional, 144nm Nominal Period, Al on Si

300-1D

Advanced Surface Microscopy, Inc.

Calibration Specimen, 1-dimensional, 288nm Nominal Period, W-coated Photoresist on Si

300-2D

Advanced Surface Microscopy, Inc.

Calibration Specimen, 2-dimensional, 297nm Nominal Period, Aluminum Bumps on Si

302-edu

Advanced Surface Microscopy, Inc.

Student Grade Calibration Specimen, 2-dimensional, 297nm Nominal Period, Aluminum Bumps on Si

301BE

Advanced Surface Microscopy, Inc.

Calibration Specimen, 1-dimensional, 292nm Nominal Period, Ti on Si

70-1D

Advanced Surface Microscopy, Inc.

Calibration Specimen, 1-dimensional, 70nm Nominal Period, HSQ Resist (Silicon Oxide) on Si.

700-1D

Advanced Surface Microscopy, Inc.

Calibration Specimen, 1-dimensional, 700nm Nominal Period, W-coated Photoresist on Si

700-2D

Advanced Surface Microscopy, Inc.

Calibration Specimen, 2-dimensional, 700nm Nominal Period, W-coated Photoresist on Si

750-HD

Advanced Surface Microscopy, Inc.

750-HD Calibration Specimen, 1-dimensional, 750nm Period, 100nm Height

751-HD

Advanced Surface Microscopy, Inc.

Nickel NanoChannel Array Substrate, Width 370nm, Depth 180nm

SEM Mount

Advanced Surface Microscopy, Inc.

SEM Mount Service for ASM Calibration Specimen