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MikroMasch HQ Line Test Structures: TGXYZ Calibration Series

MikroMasch HQ Line Test Structures: TGXYZ Calibration Series

MikroMasch HQ Line product screencast on test structures TGXYZ calibration series presented by Dr. Penka Terziyska, Product manager
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AFM probes / AFM calibration gratings related to this screencast:

TGXYZ01
XYZ Calibration Grating, 20nm Step Height, 5µm and 10µm Pitch
TGXYZ02
XYZ Calibration Grating, 100nm Step Height, 5µm and 10µm Pitch
TGXYZ03
XYZ Calibration Grating, 500nm Step Height, 5µm and 10µm Pitch