Pricelist

Lateral standards

Part Number	Description	Manufacturer	Quantity	Price, EUR
TGX01*	Silicon calibration grating with a chessboard-like array of square pillars with sharp undercut edges formed by <110> silicon crystallographic directions. 3 µm pitch	µMasch®	1	200.00*
TGX11*	Silicon calibration grating with a chessboard-like array of square pillars with sharp undercut edges formed by <110> silicon crystallographic directions. 10 µm pitch	µMasch®	1	200.00*
TGG01*	Silicon calibration gratings with a 1-D array of triangular steps having precise linear and angular dimensions defined by the crystallography of Silicon (<111> plane) and maintained with high accuracy. The edges of the triangular steps have curvature radii less than 10nm.	µMasch®	1	200.00*

Vertical standards

Part Number	Description	Manufacturer	Quantity	Price, EUR
	Calibration gratings of the TGZ series are 1-D arrays of rectangular SiO2 steps on a Si wafer. The structure is coated by Si3N4 to prevent Si from oxidation. The step height value is calibrated over the whole active area. Active area: 3 x 3 mm (all models) Chip dimensions: 5 x 5 x 0.4 5mm (all models)	µMasch®
TGZ01*	Step Height: 20 ± 1.0 nm Pitch: 3.0 µm	µMasch®	1	100.00*
TGZ02*	Step Height: 100 ± 1.5 nm Pitch: 3.0 µm	µMasch®	1	100.00*
TGZ03*	Step Height: 500 ± 1% Pitch: 3.0 µm	µMasch®	1	100.00*
TGZ04*	Step Height: 1000 ± 1% Pitch: 3.0 µm	µMasch®	1	100.00*
TGZ11*	Step Height: 1500 ± 1% Pitch: 10 µm	µMasch®	1	100.00*
TGS01*	TGS01 Silicon grating set. This set of test structures is intended for vertical calibration of SPM scanners.	µMasch®	1	200.00*
TGS02*	TGS02 Silicon grating set This set of test structures allows one to detect and quantify all kinds of SPM artifacts.	µMasch®	1	500.00
TGS03*	TGS03 Silicon grating set It is different from TGS02 set in that it does not include the vertical calibration gratings.	µMasch®	1	400.00*

Tip Characterizer

Part Number	Description	Manufacturer	Quantity	Price, EUR
ISNE	Silicon Nano Edge calibration structure. Special layout makes it easy, to return with a tip always to the identical characterizer position. Many identical sites on a single characterizer chip help to increase lifetime.	Team Nanotec®	1	2350.00
IVPS	Silicon calibration structure. Line with vertical, parallel sidewalls. Special layout makes it easy, to return with a tip always to the identical characterizer position. Many identical sites on a single characterizer chip help to increase lifetime.	Team Nanotec®	1	2350.00
IFSR	Silicon calibration structure. Line with sharp, overhanging edges. Special layout makes it easy, to return with a tip always to the identical characterizer position. Many identical sites on a single characterizer chip help to increase lifetime.	Team Nanotec®	1	1825.00