Line Scale Standards (Series LS)

manufacturer  SiMetricS®

Main Scales of Types LS W 62500 and LS D 62500

6 scales of length, µm	250	625	2500	6250	25000	62500
each with 25 periods pitch, µm	10	25	100	250	1000	2500
Certified uncertainty (typical) of pitch, nm	2.5	2.5	2.5	5	5	10
Certified uncertainty (typical) of scale's length, nm	50	50	70	100	100	200

Optional Complementary Structures of Types LS W 62500T and LS D 62500T*

6 scales of length, µm	800	600	500	400	300	200
each with 50 periods of the pitch, µm	16	12	10	8	6	4

Further Specifications of the Line Scale Standards

LS W 62500	d, µm	γ, deg	Ra(Top), nm	Pt(EG), nm
Length of the pitch p > 14 µm	5 other *	54.7	< 5	30
Length of the pitch p < 14 µm	p/(22)	54.7	< 5	-
LS D 62500*	5	ca. 90	5

Legend:
* - please inquire
d - etch depth
γ - angle of inclination of sidewalls
R_a(Top) - arithmetic average roughness of the polished surface (1000 µm scan length)
R_a(EG) - arithmetic average roughness of the etch ground (1000 µm scan length)
Pt(EG) - maximum peak to valley distance of the etch ground

Order Codes

	Wet Etch, Glass Substrate	Wet Etch, Silicon Substrate	Dry Etched, Silicon Substrate	Dry Etched, Glass Substrate
Lateral	LS WG 62500	LS WS 62500	LS DS 62500*	LS DG 62500
With Optionnal Complementary Structures	LS WG 62500 T	LS WS 62500 T	LS DS 62500 T*	LS DG 62500 T*