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 Profiler Calibration Standards
Silicon Standards - Legend For Order Codes
Lateral Standards & Vertical Standards Order Codes:
Types & Technology & Certified Parameter Nominal Value & Substrate & Option
Force Standards Order Code:
Type (F) & Shape & Cristallographic direction & Certified Parameter Nominal Value & Substrate

Type Definition
Types
LS Lateral Standard (Line Scale)
VS Vertical Standard (Depth Measurem. St.)
F Force Standard

Dimensional Standards
Technology
W Wet etched
B Bonded wafers (extra flat)
O Oxidized (selectively)
D Dry etched
Option
T Test grating

Force Standards
Shape and type of deformation
C Cantilever (one side fastened bending beam)
B Bridge (two side fastened bending beam)
Crystallographic direction
F Flat parallel (or perpendicular): <110>-direction
D Diagonal to the flat: <110>-direction

General
Certified parameter
N Nominal value (number)
Substrate
G Glass substrate
S Silicon wafer (ρ > 1Ωcm)

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