Description Calibration gratings of the TGZ series are 1-D arrays of rectangular SiO2 steps on a Si wafer. The structure is coated by Si3N4 to prevent Si from oxidation. The step height value is calibrated over the whole active area.
Actual step height, shown in the individual specifications, may slightly differ from the nominal value. Step height accuracy is a standard deviation calculated over the whole active area. It shows deviation from the actual (not nominal) step height value.
The TGZ01, TGZ02, and TGZ03 gratings are also contained in the TGS01 and TGS02 sets. NIST traceable TGZ01, TGZ02, and TGZ03 gratings are available in TGS01C and TGS02C sets only.
Note: pitch values are given for information only.
Part Number
Step height
Pitch*
TGZ01
20 ± 1.0 nm
3.0 µm
TGZ02
100 ± 1.5 nm
3.0 µm
TGZ03
500 ± 1%
3.0 µm
TGZ04
1000 ± 1%
3.0 µm
TGZ11
1500 ± 1%
10.0 µm
Active area
3 x 3 mm (all models)
Chip dimensions
5 x 5 x 0.45 mm (all models)
Application Notes TGZ calibration gratings are intended for vertical calibration of SPM scanners. Using several calibration gratings with different nominal step height you can compensate for vertical non-linearity.
For accurate quantification of images of calibration grating of TGZ series, we recommend you to use Scanning Probe Image Processor (SPIP) designed by Image Metrology, the Calibration option.
NIST certification and calibration There are TGZ01, TGZ02, and TGZ03 NIST traceable gratings, which are individually controlled and certified. The height of the steps is measured with an AFM calibrated using the Step Height Reference Standards. The reference standards are three samples of ULTRASHARP gratings that were measured and certified by NIST (NIST Reports 821/261141-99 and 821/265166-01). Measurement and calibration techniques are based on NIST modified ISO step height determination algorithm (ISO5436).
