Description Silicon calibration grating of the TGX series is a chessboard-like array of square pillars with sharp undercut edges formed by <110> silicon crystallographic directions.
Note: the dimensions marked * are given for information only. The draft is made for TGX01 grating.
Part Number
TGX01
TGX11
Pitch
3.0 µm
10.0 µm
Step Height*
1 µm
2 µm
Active area
3 x 3 mm
Edge curvature radii
less than 5 nm
Pitch accuracy
5.0 nm
Chip dimensions
5 x 5 x 0.45 mm
Application Notes TGX calibration gratings are intended for lateral calibration of SPM scanners. You can also use the gratings for: • detection of lateral non-linearity, hysteresis, creep, and cross-coupling effects; • determination of the tip aspect ratio.
For accurate quantification of images of calibration gratings of TGX series, we recommend you to use Scanning Probe Image Processor (SPIP) designed by Image Metrology.
An example of lateral non-linearity correction by the TGX01 grating is shown in Fig. 2 and 3.
Fig.1 SEM image of TGX01 grating
Fig.2 20x20µm image of TGX01 grating before the correction of nonlinearity
Fig.3 20x20µm image of TGX01 grating after the software correction of nonlinearity
