The TGS01 set includes three calibration gratings - TGZ01, TGZ02, and TGZ03. This set of test structures is intended for vertical calibration of SPM scanners. The gratings have a step height of 20 nm, 100 nm, and 500 nm respectively, which allows one to quantify vertical nonlinearity of the scanner. In TGS01C set, TGZ01 and TGZ02 gratings are NIST traceable.
TGS02 Silicon grating set
The TGS02 set includes six calibration gratings - TGZ01, TGZ02, TGZ03, TGG01, TGX01 and PA01. This set of test structures allows one to detect and quantify all kinds of SPM artifacts. It can help you make the most of the metrological capabilities of your microscope and detect distortions caused by the tip shape and piezo ceramics behavior. Use TGS02 to:
• perform vertical and lateral calibration of your scanner;
• detect vertical and lateral non-linearity and angular distortions;
• detect hysteresis;
• detect creep effect;
• visualize the geometry of the cantilever tip;
• estimate the curvature radius of the tip.
In TGS02C set, TGZ01 and TGZ02 gratings are NIST traceable.
TGS03 Silicon grating set
The TGS03 set includes three calibration gratings - TGG01, TGX01 and PA01. It is different from TGS02 set in that it does not include the vertical calibration gratings. Use TGS03 to:
• perform lateral calibration of your scanner;
• detect lateral non-linearity and angular distortions;
