Layout
88 cells on 1 x 1 mm area
on 6 x 6 silicon chip

Specification
Material: silicon
Width of line: 800nm ± 15%
Depth of line: 1µm ± 15%
Surface/sidewall angle: 90° ± 0.5°
Sidewall parallelity: < 1°
Top corner radius: < 10nm
Bottom corner radius: < 25nm
Edge roughness: < 5nm