The standard (2D100) is used for a very precise x-y-calibration of the scanning mechanism. The standard consists of a 2-dimensional lattice of inverted square pyramids with 100nm pitch etched into a silicon chip. A calibration certificate of PTB (Physikalisch Technische Bundesanstalt) is only available on special request. NANOSENSORS™ will mediate a contract between the customer and PTB. Please ask for details.      Features:      - 100 nm pitch       - high accuracy

Detailed Specifications:

Chip Chip size: 5x7 mm² Active area: 100x100 µm² The active area is located in the center of the chip and is surrounded by the FindMe structure. The lattice of inverted pyramids make up the active area. Lattice Pitch: 100 nm Accuracy of pyramid position: 10 nm Accuracy of pitch (10x10 µm² scan): 0.1% Accuracy of pitch (100x100 µm² scan): ±0.01% Pyramids Edge length of square pyramids: approx. 50 nm Sidewall angle (versus wafer surface): 54.7° Accuracy of sidewall angle: 0.5 Depth of pyramids: approx. 35 nm

Order codes and shipping units:

Order Code	Quantity	Data Sheet	Calibration Certificate
2D100	1	enclosed	n/a
2D100-CERT	1	enclosed	of PTB included

Order Code

2D100

Sensors per set

1

Price

1600.00 USD